Surface characterization analysis is to analyze the energy spectrum, spectrum, mass spectrum, spatial distribution or diffraction image of electrons, photons, ions, atoms, strong electric field, heat energy, etc. scattered or emitted from the surface by using the interaction of electrons, photons, ions, atoms, and solid surfaces to obtain information such as surface composition, surface structure, surface electronic states, and surface physical and chemical processes. Advanced material characterization methods include surface element composition, chemical state and its distribution on the surface.
Surface characterization analysis is to analyze the composition, structure and energy state of the thin layer on the solid surface or interface with only a few atomic layers, and reveal the surface morphology, composition, structure or state of materials and products.